The purpose of this Document is to standardize requirements for sulfuric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation. This Document also provides a guide for grades of sulfuric acid for which a need has been identified. In the case of these grades, the test methods may not have been statistically validated yet. The scope of this Document is all grades of sulfuric acid used in the semiconductor industry.