เคมี
เอกสารมาตรฐาน
สหรัฐอเมริกา
SEMI
C30-0218
Specification for Hydrogen Peroxide
2010
7
The purpose of this Document is to standardize requirements for hydrogen peroxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. The scope of this Document is grades of hydrogen peroxide used in the semiconductor industry.