รายละเอียดเอกสาร

เคมี

เอกสารมาตรฐาน

สหรัฐอเมริกา

SEMI

C27-0918

Specification and Guide for Hydrochloric Acid

2018

7

The purpose of this Document is to standardize requirements for grades of hydrochloric acid used in the semiconductor industry and testing procedures to support those specifications. Alternative methods may be used as long as they have been validated in accordance with the requirements of SEMI C1. This Document also provides a Guide for tiers of hydrochloric acid for which a need has been identified. In the case of the Guide, the test methods may not have been statistically validated. The scope of this Document is grades and tiers of hydrochloric acid used in the semiconductor industry.