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เคมี

เอกสารมาตรฐาน

สหรัฐอเมริกา

SEMI

C21-0618

Specification and Guide for Ammonium Hydroxide

2018

8

The purpose of this Document is to standardize requirements for ammonium hydroxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This Document also provides guidelines for grades of ammonium hydroxide for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet. The scope of this Document is all grades of ammonium hydroxide used in the semiconductor industry.