สิ่งแวดล้อม มลภาวะ ของเสีย
เอกสารมาตรฐาน
สหรัฐอเมริกา
ASTM
D5544-16
Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water
2016
9
ASTM Vol.11.01 (2023)
This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.001 μg/L (ppb) to 60 μg/L (ppb)...